• HfO₂ barrier layers: Thickness...

Treffer: HfO₂ barrier layers: Thickness-dependent corrosion protection of copper thin films for potential microelectronic applications with sweat contact

Title:
HfO₂ barrier layers: Thickness-dependent corrosion protection of copper thin films for potential microelectronic applications with sweat contact
Authors:
KAHVECİ, Osman a, d, RUSDI, Muh b, AKKAYA, Abdullah c, ⁎, AYYILDIZ, Enise a
Source:
In Microelectronics Reliability January 2026 176
Database:
ScienceDirect