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Result: First-principles mechanism of TDMAH adsorption on pristine and laser-functionalized graphene toward area-selective atomic layer deposition of HfO2

Title:

First-principles mechanism of TDMAH adsorption on pristine and laser-functionalized graphene toward area-selective atomic layer deposition of HfO2

Authors:

Khosravi, Atiye ^a, Luo, Xichun ^{a, ⁎}, Xie, Wenkun ^a, Zhang, Xiaolei ^b

Source:

In Applied Surface Science March 2026

Database:

ScienceDirect

*Result*: First-principles mechanism of TDMAH adsorption on pristine and laser-functionalized graphene toward area-selective atomic layer deposition of HfO2