*Result*: Synthesis of high-density Hf1-x Lax O2 (HLO) ceramic targets with suppressed secondary phase and growth of thin films by rf magnetron sputtering
Title:
Synthesis of high-density Hf1-x Lax O2 (HLO) ceramic targets with suppressed secondary phase and growth of thin films by rf magnetron sputtering
Authors:
Park, Jae Ho a, He, Rui b, Hong, In Pyo a, Kim, Min Joon a, Kim, Youngho c, Yu, Hak Ki c, Bark, Chung Wung a, b, ⁎
Source:
In Journal of Alloys and Compounds 15 March 2026 1058
Database:
ScienceDirect