*Result*: Electronic band structure engineering in ALD HfO2: Linking impurity chemistry to electronic performance and charge transport
Title:
Electronic band structure engineering in ALD HfO2: Linking impurity chemistry to electronic performance and charge transport
Authors:
Xia, Bingbing a, ⁎, Lin, Guocong b, Ganem, Jean-Jacques a, ⁎, Briand, Emrick a, Steydli, Sebastien a, von Bardeleben, Jurgen a, Vickridge, Ian. a, Baron-Wiechec, Aleksandra b, ⁎
Source:
In Acta Materialia 1 January 2026 304
Database:
ScienceDirect