*sublabel_EDS*
*license_notice_EDS_guest_loggedout*
*Login*
*custom_text_above_search_result**custom_text_above_search_result_EDS*
*Showing* 1 - 20
*of* 5*number_thousands_separator*814
*custom_text_below_search_result*
*Refine Results*
*Limiter*
*Expander*
*Format*
*SubjectEDS*
hfo2
3*number_thousands_separator*889
atomic layer deposition
588
thin-films
529
zro2
475
films
469
silicon
448
*more* ...
gate dielectrics
429
oxide
397
dielectrics
385
hafnium oxide
329
deposition
316
electrical-properties
301
al2o3
295
si
285
hfo2 films
266
temperature
253
growth
251
interface
240
layer
225
ald
224
high-k
224
devices
214
oxides
210
reliability
186
performance
182
stability
182
hfo2 thin-films
180
memory
180
optical-properties
180
thermal-stability
180
*less* ...
*Published in*
applied physics letters
265
applied surface science
222
ieee transactions on electron devices
191
microelectronic engineering
172
ieee electron device letters
163
thin solid films
160
*more* ...
journal of applied physics
152
journal of alloys and compounds
122
ceramics international
105
nanotechnology
72
acs applied electronic materials
66
materials science in semiconductor processing
58
ieee journal of the electron devices society
44
microelectronics reliability
43
nanomaterials
41
materials
37
journal of the european ceramic society
35
acs applied materials interfaces
33
vacuum
33
advanced electronic materials
31
optical materials
31
solid state electronics
31
nanoscale research letters
30
current applied physics
29
nano letters
24
materials chemistry and physics
23
scientific reports
23
acs nano
22
journal of luminescence
20
micromachines
20
*less* ...
*Publisher*
ieee-inst electrical electronics engineers inc
475
amer inst physics
394
elsevier science bv
385
iop publishing ltd
336
elsevier b.v.
313
elsevier science sa
285
*more* ...
amer chemical soc
257
elsevier
214
pergamon-elsevier science ltd
211
elsevier ltd
201
springer
171
wiley-v c h verlag gmbh
142
mdpi
140
a v s amer inst physics
118
electrochemical soc inc
105
royal soc chemistry
80
ieee
77
wiley
75
american chemical society
71
ccsd
69
aip publishing
68
mdpi ag
66
hal ccsd
43
wiley-vch
38
inst pure applied physics
30
nature portfolio
23
springeropen
20
american institute of physics
17
escholarship, university of california
16
institute of electrical and electronics engineers
16
*less* ...
*Language*
*Geography*
*CollectionLibrary*
Directory Of Open Access Journals: Doaj Articles
76
Archive Ouverte Hal (Hyper Article En Ligne, Ccsd - Centre Pour La Communication Scientifique Directe)
43
National Tsing Hua University Institutional Repository (Nthur)
38
Seoul National University: S-Space
33
Hal-Cea (Commissariat A L'energie Atomique Et Aux Energies Alternatives)
26
National Chi Nan University (Ncnu) Repository
24
*more* ...
Peking University Institutional Repository (Pku Ir) / 北京大学机构知识库
23
Pohang University Of Science And Technology (Postech): Open Access System For Information Sharing (Oasis)
23
Korea Advanced Institute Of Science And Technology: Koasas - Kaist Open Access Self-Archiving System
21
National University Of Singapore: Scholarbank@Nus
21
Universite Grenoble Alpes: Hal
21
National Taiwan University Institutional Repository (Ntur)
18
Citeseerx
17
Theses.Fr
13
Ghent University Academic Bibliography
10
Publikationsdatenbank Der Fraunhofer-Gesellschaft
10
Dresden University Of Technology: Qucosa
9
Universita Degli Studi Di Ferrara: Cineca Iris
8
University College Cork, Ireland: Cork Open Research Archive (Cora)
8
Dgist Scholar (Daegu Gyeongbuk Institute Of Science & Technology)
7
Digital.Csic (Consejo Superior De Investigaciones Cientificas / Spanish National Research Council)
7
Aix-Marseille Universite: Hal
6
Chalmers Research (Chalmers University Of Technology, Gothemborg / Chalmers Tekniska Hogskola)
6
Universitat Autonoma De Barcelona: Diposit Digital De Documents De La Uab
6
University Of California: Escholarship
6
Document Server@Uhasselt (Universiteit Hasselt)
5
Lund University Publications (Lup)
5
Universitat Autonoma De Barcelona (Uab): Tesis Doctorals En Xarxa (Tdx) / Theses And Dissertations Online
5
Digital Commons @ New Jersey Institute Of Technology (Njit)
4
Engineering Conferences International: Eci Digital Archives
4
*less* ...
*SourceEDS*
*adv_search_year*
*Filter*